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MS12-G - Compressed air preparation

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		537148 MS12-LR-G-D7-LD-AS	537148	MS12-LR-G-D7-LD-AS	4.000	4052568172237
		537149 MS12-LFR-G-D7-EUV-...	537149	MS12-LFR-G-D7-EUV-LD-AS	7.000	4052568172244
		537150 MS12-LFR-G-D7-CUV-...	537150	MS12-LFR-G-D7-CUV-LD-AS	7.000	4052568172251
		537151 MS12-LF-G-EUV	537151	MS12-LF-G-EUV	7.000	4052568172268
		537152 MS12-LF-G-CUV	537152	MS12-LF-G-CUV	7.000	4052568172275
		537153 MS12-LFM-G-BUV	537153	MS12-LFM-G-BUV	7.000	4052568172282
		537154 MS12-LFM-G-AUV	537154	MS12-LFM-G-AUV	7.000	4052568172299
		537155 MS12-LFX-G-U	537155	MS12-LFX-G-U	7.000	4052568172305
		537156 MS12-LOE-G-U	537156	MS12-LOE-G-U	6.500	4052568172312
		541495 MS12-EM-G	541495	MS12-EM-G	3.900	4052568179670
		541496 MS12-EE-G-V24	541496	MS12-EE-G-V24	3.800	4052568179687
		541497 MS12-DL-G	541497	MS12-DL-G	3.600	4052568179694
		541498 MS12-DE-G-V24	541498	MS12-DE-G-V24	3.800	4052568179700
		541680 MS12-LR-G-PO	541680	MS12-LR-G-PO	4.000	4052568179748
		541681 MS12-FRM-G	541681	MS12-FRM-G	3.000	4052568179755
		564888 MS12-LR-G-PE6	564888	MS12-LR-G-PE6	4.000	4052568211882
		8005550 MS12-LWS-G-U-V	8005550	MS12-LWS-G-U-V	0.006	4052568257293

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